In Memoriam: Professor Andrew R. Neureuther, pioneer of integrated circuit simulation, passes at 84

Andrew R. Neureuther, a distinguished professor emeritus of electrical engineering and computer sciences at the University of California, Berkeley, passed away on September 9th, 2025, shortly after his 84th birthday. A true pioneer in the field of microelectronics, he leaves behind a profound legacy that has shaped integrated circuit manufacturing and design for decades.

Professor Neureuther was renowned for his groundbreaking work in modeling and simulating integrated circuit processes. His pioneering tools and methodologies—including STORM, SAMPLE, SPLAT, and TEMPEST—revolutionized the way engineers understood and addressed manufacturing issues in emerging technologies. He dedicated his career to advancing the field, publishing over 250 papers and advising nearly 70 graduate students.

His extraordinary contributions were widely recognized through numerous prestigious honors. He was a Fellow of the IEEE, an elite distinction awarded to those who have made exceptional accomplishments. In 1995, he was elected to the National Academy of Engineering. He received the IEEE Cledo Brunetti Award in 2003 for his contributions to miniaturization in electronics and the Frits Zernike Award for Microlithography in 2011. He was also honored with the Berkeley Citation in 2007, the university’s highest honor.

After earning his B.S., M.S., and Ph.D. degrees in Electrical Engineering from the University of Illinois, Urbana, Professor Neureuther joined the UC Berkeley faculty in 1966. He held the esteemed position of Conexant Systems Distinguished Professor. His work and mentorship have left an indelible mark on generations of engineers and researchers.

The Neureuther Fellowship, established in 2017 by Kishore Seendripu (M.S. ‘92 MSE, Ph.D. ‘96 EECS), continues to honor his legacy through support for high-achieving graduate students. Contact Dale Masterson (dmasterson@berkeley.edu) to learn more.